Ultraclean Surface Processing of Silicon Wafers: Secrets of VLSI Manufacturing Pdf

Ultraclean Surface Processing of Silicon Wafers: Secrets of VLSI Manufacturing Pdf
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A totally new concept for clear flooring processing of Si wafers is launched on this book. Some fifty distinguished researchers and engineers from the primary Japanese semiconductor firms, reminiscent of NEC, Hitachi, Toshiba, Sony and Panasonic along with from a quantity of universities disclose to us for the first time the secrets and techniques and methods of these extraordinarily productive institutions. They describe the strategies and kit obligatory for the preparation of clear high-high high quality semiconductor surfaces as a main step in high-yield/high-high high quality device manufacturing. This book thus opens the door to the manufacturing of reliable nanoscale models and can in all probability be terribly useful for every engineer, physicist and technician involved inside the manufacturing of silicon semiconductor models.

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