This book incorporates a complete evaluation of CMP (Chemical-Mechanical Planarization) technology, one of probably the most thrilling areas within the subject of semiconductor technology. It accommodates detailed discussions of all features of the technology, for each dielectrics and metals. The state of sprucing fashions and their relation to experimental outcomes are coated. Sprucing instruments and consumables are additionally coated. The vanguard points of damascene and new dielectrics in addition to slurryless technology are mentioned.
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